Diaphragm Type Dry Vacuum Pump DAU-20 ULVAC

Product that further pursued the ultimate pressure capacity of the diaphragm type dry vacuum pump.By placing multiple pump heads in 3 stages, an ultimate pressure that cannot be obtained by a regular diaphragm type has been realized.Wide area type turbo molecule pumps, cryopump exhaust systems, back pumps of mechanical booster pumps.Exhaust ventilation of load lock chamber.Adsorption conveyance, handling.For circulation and exhaust ventilation of laser gas.Vacuum dryer, freeze vacuum dryer.Displacement Speed (L/min) 50/60Hz:20/23Ultimate Pressure (Pa):200Inlet Caliber (mm):10Power (V):Single Phase 100Total Width x Total Length x Total Height (mm):161 x 327 x 217With thermal protector3-stage exhaust systemCorrosion resistant gas contact partDifferent voltages available(negotiable)